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| Model No.︰ | - |
| Brand Name︰ | - |
| Country of Origin︰ | China |
| Unit Price︰ | - |
| Minimum Order︰ | - |
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| Specifications︰ | ² Wafer Size：150mm
² Deposition Film：Si3N4、Poly-Si、SiO2, PSG
² Deposition Film Thickness：1000～6000 Å
² Process Temperature：350～1100℃
² Range and Precision of Temperature Zone：
760mm, ≤±1℃
Loading Capacity：25～100 pcs/tube
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